metal gate poly gate
由FOhtake著作·1999·被引用1次—Alow-contactresistancepoly-metalgatesystemconsistingofTiN/thinTiSi2/poly-Siisdescribed.Apoly-metalgateisoneofthecandidatesforthenext ...,由RCerutti著作·2005·被引用1次—Inthispaper,theauthorspresentedanintegrationstrate...
Polysilicon depletion effect
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PolysilicondepletioneffectisthephenomenoninwhichunwantedvariationofthresholdvoltageoftheMOSFETdevicesusingpolysiliconasgatematerialis ...
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